梳子驅(qū)動(dòng)（MEMS執(zhí)行器）

MEMS Electrostatic Comb Drive ActuatorProject Overview This project features a Finite Element Model (FEM) of a MEMS comb drive actuator, designed and simulated to demotrate electrostatic actuation principles. The model was developed as part of the MCT 343: Mechatronics Applicatio coue at the Faculty of Engineering, Ain Shams cal Details The design focuses on accurate geometry for defining boundary conditio and material properties in a MEMS ion Principle: Lateral electrostatic force tion Scope: Coupled-field analysis (Electrostatic-Structural).Key Outputs: Total directional deformation, Von Mises stresstrain, and voltage al Specificatio The model is set up to evaluate performance using standard MEMS materials:Flexures/Beams: Polysilicon (Young's Modulus: 160 GPa).Structural Elements: Ni-Iron (Permalloy).References & Material Data SourcesM. A. Hopcroft, W. D. Nix, and T. W. Kenny, "What is the Young's Modulus of Silicon?," Journal of Microelectromechanical Systems, vol. 19, no. 2, 2010.M. S. Scholz et al., "Mechanical Characterization of Electroplated Nickel-Iron," Seo and Materials, vol. 13, no. 8, re UsedCAD Modeling: Autodesk Inventoimulation: AYS Workbench (Files soon)Feel free to use it for your own projects or practice!"Licee: CC BY-NC-ND 4.0"This work is liceed under the Creative Commo Attribution-NonCommercial-NoDerivatives 4.0 International Licee.